AP-XPS/AP-STM

AP-XPS/AP-STM

SPECS - PVD75

NNI AP-XPS/AP-STM
NNI Oregon State University Ambient Pressure Surface Characterization Laboratory (APSCL)
  • Metrology/Characterization
    • Thin Film
      • XPS
  • Imaging
    • All Imaging
      • Probe
Description
XPS can be performed between 25 to <1 x 10-9 mbar and between 120-1073 K. STM can be performed between 100 to <1 x 10-9 mbar and between 220-773 K. A preparation chamber is attached which has a four pocket e-beam evaporator and low energy electron diffraction.
Substrate 1 cm x 1 cm.
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