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Etch Processing Public Forum

This public forum can be used to direct questions to the members of the Etch Processing working group.

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Latest Questions

What is the best approach to etching II-VI materials such as ZnSe, ZnS, ZnCdSe?

Is there a suggested protocol to follow when opening a chlorine based etch chamber for maintenance?

Should metal hard masks be used in Bosch deep silicon etch systems? Are there any consequences?

When bringing up a new XeF2 system, are there any suggested starting parameters?

Can one release CdS structures from Si using XeF2?

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