Etch Processing
This is the NNCI Working Group on Etch Processing.
Etch Processing News
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Members
| Name | Facility | |
|---|---|---|
| Vincent Genova | Cornell NanoScale Science & Technology Facility (CNF) | genova@cnf.cornell.edu |
| Hang Chen | Institute for Electronics and Nanotechnology Micro/Nano Fabrication Facility | hang.chen@ien.gatech.edu |
| Sarmita Majumder | Microelectronics Research Center (MRC) | sarmita@utexas.edu |
| Peter Duda | Pritzker Nanofabrication Facility (PNF) | duda@uchicago.edu |
| Bob Geil | Chapel Hill Analytical and Nanofabrication Laboratory (CHANL) | bob.geil@unc.edu |
| Evgeniya Moiseeva | Micro Nano Technology Center (MNTC) | evgenia.moiseeva@louisville.edu |
| Jiong Hua | Nebraska Center for Materials and Nanoscience (NCMN) | jhua2@unl.edu |
| Xuekun Lu | Nano3 Cleanroom Facility | xklu@ucsd.edu |