3D X-ray Tomography System

The ZEISS Xradia 510 Versa X-ray microscopes (XRM) is a high-resolution 3D X-ray imaging system for non-destructive analysis. Xradia 510 allows submicron imaging of samples from mm to inches with weight up to 15 kg and sample size up to 300 mm. Specifically, the resolution of the system achieves < 0.7 μm true spatial resolution with minimum achievable voxel size < 70 nm of samples. The high resolution and contrast with flexible working distances provides excellent non-destructive imaging performance.