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Amod Evaporator

Amod Evaporator

Angstrom Engineering - Amod

MONT Amod Evap
MONT Montana State University Montana Microfabrication Facility (MMF)
  • Thin Film Processing
    • Metal
      • Evaporation
Description
The Amod evaporator is a computer controlled, load locked evaporation system. This tool is equiped with a 7cc, 4-pocket telemark ebeam system and two resistive sources. Each source is shuttered and has an independent crystal monitor. The system also has a glow discharge source in the main chamber and an RGA detector
Maximum Substrate Size
6 inch
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