FEI Helios Nanolab
FEI Helios Nanolab
FEI - Helios
SHyNE Resource
Northwestern University
Northwestern University Atomic and Nanoscale Characterization Experimental Center (NUANCE)
- Imaging
- All Imaging
- FIB
Description
A Dual Beam SEM FIB with a field emission electron source. This system is used extensively for TEM and Atom Probe Sample preparation, and has a dedicated Ion Beam Lithography System and EDS detector.
Restrictions
Instrument specific training