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Thermo Fisher Scios DualBeam FIB/SEM

Thermo Fisher Scios DualBeam FIB/SEM

Thermo Fisher - Scios

SDNI Scios SEM/FIB
SDNI University of California, San Diego Nano3 Cleanroom Facility
  • Imaging
    • All Imaging
      • FIB
      • SEM
Description
Thermo Fisher Scientific Scios DualBeam is an ultra-high-resolution analytical SEM/FIB system that delivers outstanding performance for a broad range of samples. The microscope is equipped with: NICol electron column; High-throughput ion column; Cryo stage; Gas Injectors (Selective carbon mill, Insulator Enhanced Etch, Platinum Deposition); FEI EasyLift LT NanoManipulator; In-lens BSE and SE detectors; ETD and ICE detectors; Integrated current measurement; Quick Loader; Bruker SDD EDS system; AutoSlice and View G3 Extended Package for automated sequential mill and view; Avizo 3D Software Package for 3D visualization and analysis; AutoTEM Wizard for automated TEM sample preparation and cross-sectioning; MAPS Package for automatic acquisition of large images and correlative work; and Mighty EBIC 2.0 for electron-beam-induced current (EBIC) analysis. The FEI Scios dualbeam is capable of nano-deposition, nano-prototyping, nano-characterization and nano-analysis from -180C to 70C.
Maximum Substrate Size
4 inch
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